VCA200 series
ALD Valve
A compactly designed body with minimal dead space.
Body materials comply with SEMI F-20, “Specification for 316LSS Materials for UHP (Ultra High Purity) Grade Semiconductor Manufacturing Applications”
Maximum flow capacity
Minimal particle generation
Minimal contributions of moisture, oxygen and hydrocarbon with UNILOK’s own special cleaning process in a certified clean room
Excellent finish level of wetted areas with UNILOK’s own electro polish process
Elgiloy® diaphragm material with strong durability as well as corrosion resistance for long cycle life
PCTFE seat material with remarkable chemical and thermal resistance
For information on how to order and detailed dimensions view the page below
If you have any questions or need any additional information please reach out to one of our representatives
Specifications
| Cv Value | 0.62 | |
| Working Pressure | Vacuum to 145 psig | |
| Max. Working Temp | Normal Type : 0~120°C(32~248°F) | |
| High Temp. Type : 0~200°C(32~392°F) | ||
| Inboard leakage | ≤ 1×10-9 atm.cc/s | |
| Allowance-He | ||
| Internal leakage | ≤ 1×10-9 atm.cc/s | |
| Allowance-He | ||
| Materials | Body | 316L VAR SS |
| Actuator | ALUMINUM |
For more information on our full line of valves, please contact a sales representative.