PSH 030 Ultra High Purity Bellows Pump With Shuttle Valve

Max Flow Rate: 22.8 LPM

Max Temperature: 145°C (293°F)

Max Pressure: 5.5 Bar (80 PSI)

Fluid Path Materials: PTFE / PFA

Non Fluid Path Materials: PTFE / PFA / PP / Ceramic

Applications: Semiconductor Manufacturing