Max Flow Rate: 118 LPM
Max Temperature: 145°C (293°F)
Max Pressure: 5.5 Bar (80 PSI)
Fluid Path Materials: PTFE / PFA
Non Fluid Path Materials: PTFE / PFA / PP / Ceramic
Applications: Semiconductor Manufacturing
Pump Features
Spec Sheet
Performance Curves
Specifications
Pump Features
- 100% Metal-Free
- Process-safe PTFE and PFA flow paths
- Leak-proof, machined design
- PTFE heads with Buttress-Threads
- No elastomer O-rings, no leaks, never retorque
- No lubrication in shift mechanisms
- No electric motors, which generate heat
- Pneumatic Logic™ minimizes liquid pulsation and pump vibration
- Various liquid connection options
- Safe, leak-free operation due to no-metal design
- Ceramic in air shuttle valve
- Minimal parts for durable design
- Class 100 cleanroom assembly, testing, and packaging
- Easy to install and service
- No preventative maintenance during two-year warranty
- Robust bellows offer supply pressure of 5.5 Bar (80 psi)
- Dead-head capable operation
Spec Sheet
Performance Curves
Specifications
Model
|
PSH015
|
PSH030 |
PSH060
|
PSH140
|
---|---|---|---|---|
Max Flow Rate* |
13.4 lpm
3.54 gpm |
22.8 lpm
6.02 gpm |
58.3 lpm
15.40 gpm |
118 lpm
31.3 gpm |
Size of Air Connection |
1/4-in FNPT
|
1/4-in FNPT
|
1/4-in FNPT
|
3/8-in FNPT
|
Displacement Per Cycle* |
0.074 liters
0.019 gal |
0.074 liters
0.019 gal |
0.178 liters
0.047 gal |
0.500 liters
0.132 gal |
Cycles Per Minute* |
216 max
|
333 max
|
348 max
|
254 max
|
Weight |
4.6 kg (10.1 lb)
|
4.6 kg (10.1 lb)
|
7.3 kg (16.1 lb)
|
18.5 kg (40.9 lb)
|
Suction Lift* |
1 m (3 ft)
|
1 m (3 ft)
|
1 m (3 ft)
|
1 m (3 ft)
|
Sound Pressure** |
74.00 dB(a)
79.90 dB(a) |
74.00 dB(a)
79.90 dB(a) |
73.11 dB(a)
82.50 dB(a) |
71.73 dB(a)
75.42 dB(a) |
Sound Power** |
63.01 dB(a)
69.90 dB(a) |
63.01 dB(a)
69.90 dB(a) |
64.29 dB(a)
74.11 dB(a) |
70.46 dB(a)
75.27 dB(a) |
Max Temperature |
145°C (293°F)
|
|||
Max Pressure |
5.5 Bar (80 psi)
|
|||
Fluid Path Materials |
PTFE / PFA
|
|||
Non-Fluid Path Materials |
PTFE / PFA / ceramic
|
|||
Stroke Detection Options |
Fiber optic with or without sensor, or solid state pressure switch
|
|||
Leak Detection Options |
Fiber optic with or without sensor, or conductivity
|
|||
Electronic Control |
Available
|
|||
Model
|
PSH015
|
PSH030
|
PSH060
|
PSH140
|