PSU 030 Ultra High Purity Bellows Pump With Shuttle Valve
Max Flow Rate: 26.2 LPM
Max Temperature: 210°C (410°F)
Max Pressure: 7 Bar (100 PSI)
Fluid Path Materials: PTFE / PFA
Non Fluid Path Materials: PTFE / PFA / Ceramic
Applications: Semiconductor Manufacturing
Pump Features
Spec Sheet
Performance Curves
Specifications
Pump Features
- 100% Metal-Free
- Process-safe PTFE and PFA flow paths
- Leak-proof, machined design
- PTFE heads with Synchro-Thread™
- No elastomer O-rings, no leaks, never retorque
- No lubrication in shift mechanisms
- No electric motors, which generate heat
- Pneumatic Logic™ minimizes liquid pulsation and pump vibration
- Various liquid connection options
- Safe, leak-free operation due to no-metal design
- Polypropylene and ceramic in air side
- Minimal parts for durable design
- Class 100 cleanroom assembly, testing, and packaging
- Easy to install and service
- Robust bellows enable supply pressure of 7 Bar (100 psi)
- Dead-head capable operation
- No preventative maintenance during two-year warranty
Spec Sheet
Performance Curves
Specifications
Model | PSU030 | PSU060 | PSU140 |
|---|---|---|---|
| Max Flow Rate* | 26.2 lpm 6.92 gpm | 62.2 lpm 16.43 gpm | 123 lpm 32.5 gpm |
| Size of Air Connection | 1/4-in FNPT | 1/4-in FNPT | 3/8-in FNPT |
| Displacement Per Cycle* | 0.074 liters 0.019 gal | 0.178 liters 0.047 gal | 0.500 liters 0.132 gal |
| Cycles Per Minute* | 333 max | 348 max | 273 max |
| Weight | 6.2 kg (14.1 lb) | 15.17 kg (33.4 lb) | 22.68 kg (50.0 lb) |
| Suction Lift* | 1 m (3 ft) | 1 m (3 ft) | 1 m (3 ft) |
| Sound Pressure** | 74.00 dB(a) 79.90 dB(a) | 73.11 dB(a) 82.50 dB(a) | 81.98 dB(a) 91.60 dB(a) |
| Sound Power** | 63.01 dB(a) 69.90 dB(a) | 64.29 dB(a) 74.11 dB(a) | 76.37 dB(a) 83.16 dB(a) |
| Max Temperature | 210°C (410°F) | ||
| Max Pressure | 7 Bar (100 psi) | ||
| Fluid Path Materials | PTFE / PFA | ||
| Non-Fluid Path Materials | PTFE / PFA / ceramic | ||
| Stroke Detection Options | Fiber optic with or without sensor, or solid state pressure switch | ||
| Leak Detection Options | Fiber optic with or without sensor, or conductivity | ||
| Electronic Control | Available | ||
Model | PSU030 | PSU060 | PSU140 |