PSU 140 Ultra High Purity Bellows Pump With Shuttle Valve
Max Flow Rate: 123 LPM
Max Temperature: 210°C (410°F)
Max Pressure: 7 Bar (100) psi
Fluid Path Materials: PTFE / PFA
Non Fluid Path Materials: PTFE / PFA / Ceramic
Applications: Semiconductor Manufacturing
Pump Features
Spec Sheet
Performance Curves
Specifications
Pump Features
- 100% Metal-Free
- Process-safe PTFE and PFA flow paths
- Leak-proof, machined design
- PTFE heads with Synchro-Thread™
- No elastomer O-rings, no leaks, never retorque
- No lubrication in shift mechanisms
- No electric motors, which generate heat
- Pneumatic Logic™ minimizes liquid pulsation and pump vibration
- Various liquid connection options
- Safe, leak-free operation due to no-metal design
- Polypropylene and ceramic in air side
- Minimal parts for durable design
- Class 100 cleanroom assembly, testing, and packaging
- Easy to install and service
- Robust bellows enable supply pressure of 7 Bar (100 psi)
- Dead-head capable operation
- No preventative maintenance during two-year warranty
Spec Sheet
Performance Curves
*Graph is for reference only. Performance was measured utilizing 1/2 in (3/8 in ID) air line and 1-1/4 in (1-1/8 in ID) liquid lines with 1 ft flooded suction. Performance may vary in your system.
Specifications
|
Model
|
PSU030
|
PSU060
|
PSU140
|
|---|---|---|---|
| Max Flow Rate* |
26.2 lpm
6.92 gpm |
62.2 lpm
16.43 gpm |
123 lpm
32.5 gpm |
| Size of Air Connection |
1/4-in FNPT
|
1/4-in FNPT
|
3/8-in FNPT
|
| Displacement Per Cycle* |
0.074 liters
0.019 gal |
0.178 liters
0.047 gal |
0.500 liters
0.132 gal |
| Cycles Per Minute* |
333 max
|
348 max
|
273 max
|
| Weight |
6.2 kg (14.1 lb)
|
15.17 kg (33.4 lb)
|
22.68 kg (50.0 lb)
|
| Suction Lift* |
1 m (3 ft)
|
1 m (3 ft)
|
1 m (3 ft)
|
| Sound Pressure** |
74.00 dB(a)
79.90 dB(a) |
73.11 dB(a)
82.50 dB(a) |
81.98 dB(a)
91.60 dB(a) |
| Sound Power** |
63.01 dB(a)
69.90 dB(a) |
64.29 dB(a)
74.11 dB(a) |
76.37 dB(a)
83.16 dB(a) |
| Max Temperature |
210°C (410°F)
|
||
| Max Pressure |
7 Bar (100 psi)
|
||
| Fluid Path Materials |
PTFE / PFA
|
||
| Non-Fluid Path Materials |
PTFE / PFA / ceramic
|
||
| Stroke Detection Options |
Fiber optic with or without sensor, or solid state pressure switch
|
||
| Leak Detection Options |
Fiber optic with or without sensor, or conductivity
|
||
| Electronic Control |
Available
|
||
|
Model
|
PSU030
|
PSU060
|
PSU140
|