PSA030 Ultra Pure Bellows Pump
Max Flow Rate: 24.7 LPM
Max Temperature: 100°C (212°F)
Max Pressure: 7 Bar (100) psi
Fluid Path Materials: PTFE / PFA
Non Fluid Path Materials:PTFE / PFA / PP / Ceramic
Applications: Semiconductor Manufacturing
PSA060 Ultra Pure Bellows Pump
Max Flow Rate: 62.3 LPM
Max Temperature: 100°C (212°F)
Max Pressure: 7 Bar (100) psi
Fluid Path Materials: PTFE / PFA
Non Fluid Path Materials:PTFE / PFA / PP / Ceramic
Applications: Semiconductor Manufacturing
PSA140 Ultra Pure Bellows Pump
Max Flow Rate: 123 LPM
Max Temperature: 100°C (212°F)
Max Pressure: 7 Bar (100) psi
Fluid Path Materials: PTFE / PFA
Non Fluid Path Materials:PTFE / PFA / PP / Ceramic
Applications: Semiconductor Manufacturing
PSH030 Ultra Pure Bellows Pump
Max Flow Rate: 22.8 LPM
Max Temperature: 145°C (293°F)
Max Pressure: 5.5 Bar (80 psi)
Fluid Path Materials: PTFE / PFA
Non Fluid Path Materials: PTFE / PFA / Ceramic
Applications: Semiconductor Manufacturing
PSH060 Ultra Pure Bellows Pump
Max Flow Rate: 58.3 LPM
Max Temperature: 145°C (293°F)
Max Pressure: 5.5 Bar (80 psi)
Fluid Path Materials: PTFE / PFA
Non Fluid Path Materials: PTFE / PFA / Ceramic
Applications: Semiconductor Manufacturing
PSH140 Ultra Pure Bellows Pump
Max Flow Rate: 118 LPM
Max Temperature: 145°C (293°F)
Max Pressure: 5.5 Bar (80 psi)
Fluid Path Materials: PTFE / PFA
Non Fluid Path Materials: PTFE / PFA / Ceramic
Applications: Semiconductor Manufacturing
PSU030 Ultra Pure Bellows Pump
Max Flow Rate: 26.2 LPM
Max Temperature: 210°C (410°F)
Max Pressure: 7 Bar (100) psi
Fluid Path Materials: PTFE / PFA
Non Fluid Path Materials: PTFE / PFA / Ceramic
Applications: Semiconductor Manufacturing
PSU060 Ultra Pure Bellows Pump
Max Flow Rate: 62.2 LPM
Max Temperature: 210°C (410°F)
Max Pressure: 7 Bar (100) psi
Fluid Path Materials: PTFE / PFA
Non Fluid Path Materials: PTFE / PFA / Ceramic
Applications: Semiconductor Manufacturing
PSU140 Ultra Pure Bellows Pump
Max Flow Rate: 123 LPM
Max Temperature: 210°C (410°F)
Max Pressure: 7 Bar (100) psi
Fluid Path Materials: PTFE / PFA
Non Fluid Path Materials: PTFE / PFA / Ceramic
Applications: Semiconductor Manufacturing
For more information on our full line of bellow pumps, including our proximity and fiber optic series pumps please contact a sales representative.