
Lined Valves
Lined Diaphragm Series Valve’s diaphragm is made of high-purity fluoropolymer material and maintains excellent airtightness due to its specialized design structure. It is used as a control valve for equipment and pressure vessels that supply high purity chemical lines in the semiconductor and LCD industries.
Data Sheets
Pneumatic Valve
Manual Valve


Pneumatic Specs
Manual Specs
Operating Specifications
Material Construction Pneumatic
Material Construction Manual
Pneumatic Specs
Size | P/N | CV | FFL | HI | HO | BCD | OD | THK | D |
JIS 15A JIS 20A JIS 25A JIS 40A JIS 50A ANSI 1/2″ ANSI 3/4″ ANSI 1″ ANSI 1-1/2″ ANSI 2″ DIN 20D DIN 25D DIN 40D DIN 50D | LPV-15-J-AC LPV-20-J-AC LPV-25-J-AC LPV-40-J-AC LPV-50-J-AC LPV-15-A-AC LPV-20-A-AC LPV-25-A-AC LPV-40-A-AC LPV-50-A-AC LPV-20-D-AC LPV-25-D-AC LPV-40-D-AC LPV-50-D-AC | 4.7 4.7 9.5 22.3 39.2 4.7 4.7 9.5 22.3 39.2 4.7 9.5 22.3 39.2 | 150 150 160 200 230 150 150 160 200 230 150 160 200 230 | 158 158 174 217.5 257 158 158 174 217.5 257 158 174 217.5 257 | 103 103 109 130 153 103 103 109 130 153 103 109 130 153 | 70 75 90 105 120 60.4 69.9 79.2 98.5 120.6 75 85 110 125 | 95 100 125 140 155 88.9 98.5 108 127 152.5 105 115 150 165 | 12 14 14 16 16 11.2 12.7 14.2 17.5 19.1 16 16 16 18 | 48 54 64 78 88 39 48 57 75 89 55 64 84 94 |
Manual Specs
Size | P/N | CV | FFL | HI | HO | BCD | OD | THK | D |
JIS 15A JIS 20A JIS 25A JIS 40A JIS 50A ANSI 1/2″ ANSI 3/4″ ANSI 1″ ANSI 1-1/2″ ANSI 2″ DIN 20D DIN 25D DIN 40D DIN 50D | LMV-15-J-AC LMV-20-J-AC LMV-25-J-AC LMV-40-J-AC LMV-50-J-AC LMV-15-A-AC LMV-20-A-AC LMV-25-A-AC LMV-40-A-AC LMV-50-A-AC LMV-20-D-AC LMV-25-D-AC LMV-40-D-AC LMV-50-D-AC | 4.7 4.7 9.5 22.3 39.2 4.7 4.7 9.5 22.3 39.2 4.7 9.5 22.3 39.2 | 150 150 160 200 230 150 150 160 200 230 150 160 200 230 | 110 110 117.5 182 195 110 110 117.5 182 195 110 117.5 182 195 | 90 90 90 140 140 90 90 90 140 140 90 90 140 140 | 70 75 90 105 120 60.4 69.9 79.2 98.5 120.6 75 85 110 125 | 95 100 125 140 155 88.9 98.5 108 127 152.5 105 115 150 165 | 12 14 14 16 16 11.2 12.7 14.2 17.5 19.1 16 16 16 18 | 48 54 64 78 88 39 48 57 75 89 55 64 84 94 |
Operating Specifications
Operating Temperature | Maximum Operating Pressure |
0~90℃ | 9㎏/㎠(0.9Mpa) |
90~120℃ | 7㎏/㎠(0.7Mpa) |
Material Construction Pneumatic
PFA Lining | Cylinder |
High Purity PFA | Aluminum Die Casting |
Material Construction Manual
PFA Lining | Steel Housing |
High Purity PFA | Stainless Steel SCS13 |
For more information on our full line of PFA valves, fittings, and more, please contact a sales representative.